The Equipment Related Business
Process Tools Parts
Cleaning
We perform cleaning for semiconductors and FPD production equipment parts (TFT/ OLED).
In addition to pure water cleaning, we are also equipped with sand blasters and plasma spraying apparatus.
To meet the needs of our customers, we have the latest miniaturization equipment that supports 28nm.
Organisational Structure of the Parts Micro Cleaning Business
FerroTec Anhui FTSVA
Anhui Ferrotec(Anhui)Technology Co., Ltd.
- Founded
- 2018/12
-
- Semi
- Display
-
- 30%

- 70%
- Total area
-
-
24000㎡
-
Total clean room
-
2000㎡
-
- Size capability
-
Semi size
(PVD/CVD/DIFF/Etch/Photo-L)
Display size
-
-
L 4000mm
×W 800mm
×D 500mm
-
10.5G
- Staff
- 325
- Special process
- Precision Cleaning / Anodic oxidation / plasma spraying / arsenic treatment / water jet cleaing
Enhance quatz cleanning / Bead Blasting / Al/Ti Arc Spray
- Adress
-
Jinling Economic Dvlpt Zone, Tongling County, Anhui, P.R. China
-
Map
FerroTec Dalian FTSVD
Dalian Ferrotec (Dalian) Technology Co.,Ltd.
- Founded
- 2017/3
-
- Semi
- Display
-
- 100%

- 0%
- Total area
-
-
6400㎡
-
Total clean room
-
360㎡
-
- Size capability
-
Semi size
(PVD/CVD/DIFF/Etch/Photo-L)
Display size
-
-
L 1500mm
×W 800mm
×D 500mm
-
---
- Staff
- 99
- Special process
- Precision Cleaning / Enhance quatz cleanning / Bead Blasting / Al/Ti Arc Spray
- Adress
-
179-8, Haiming Rd, Bldg. B4 GLPI-Park, Dalian Free Trade Zone, Dalian, Liaoning, China
-
Map
FerroTec Tianjin FTSVT
Tianjin Ferrotec (Tianjin) Technology Co.,Ltd
- Founded
- 2011/9
-
- Semi
- Display
-
- 50%

- 50%
- Total area
-
-
4000㎡
Semi:1500㎡
Display:2500㎡
-
Total clean room
-
400㎡
Semi:200㎡
Display:200㎡
-
- Size capability
-
Semi size
(PVD/Etch/CVD)
Display size
-
-
L 1500mm
×W 800mm
×D 500mm
-
8.5G
L 3200mm
×W 800mm
×D 1000mm
- Staff
- 99
- Special process
- Precision Cleaning / Bead Blasting / Al Arc Spray
- Adress
-
#2 Jingjun xiyuan Jingbin Industrial Park Wuqing District, Tianjin P.R. China
-
Map
FerroTec Sichuan FTSVS
Sichuan Ferrotec (Sichuan) Technology Co.,Ltd
The first factory
- Founded
- 2016/1
-
- Semi
- Display
-
- 0%

- 100%
- Total area
-
-
5000㎡
-
Total clean room
-
550㎡
-
- Size capability
-
Semi size
Display (LCD) size
-
-
---
-
8.5G
L 3200mm
×W 800mm
×D 1000mm
- Staff
- 128
- Special process
- Precision Cleaning / Bead Blasting / Al Arc Spray
- Adress
-
The Northern Section of Sichuan Province AnTai Neijiang Economic and Technological Development Zone Street # 888, China
-
Map
The second factory
- Founded
- 2018/3
-
- Semi
- Display
-
- 20%

- 80%
- Total area
-
-
16000㎡
-
Total clean room
-
900㎡
Semi:300㎡
Display:600㎡
-
- Size capability
-
Semi size
(PVD/Etch/CVD)
Display(OLED) size
-
-
L 1500mm
×W 800mm
'×D 500mm
-
6G
L 3200mm
×W 1200mm
×D 8500mm
- Staff
- 84
- Special process
- Precision Cleaning / Bead Blasting / Al Arc Spray
- Adress
-
The Northern Section of Sichuan Province AnTai Neijiang Economic and Technological Development Zone Street # 888, China
-
Map
FerroTec Shanghai FTSVC
Shanghai Ferrotec (Shanghai) Technology Co., Ltd.
- Founded
- 2019/6
-
- Semi
- Display
-
- 100%

- 0%
- Total area
-
-
1500㎡
-
Total clean room
-
200㎡
-
- Size capability
-
Semi size
(ETCH)
Display Size
-
-
L 800mm
×W 800mm
×D 400mm
-
---
- Staff
- 40
- Special process
- Precision Cleaning / Bead Blasting / Al Arc Spray
- Adress
-
181 Shanlian Road,Shanhai Baoshan City Industrial Zone 200444,P.R.China
-
Map
Manufacturing sites of this product