The Equipment Related BusinessEssential Devices in the Manufacturing Process

SiC Parts (CVD-SiC)

Ultra-High Purity, High Heat Resistance and
High Wear Resistance Silicon
Carbide Products from Original CVD Production Method

Our SiC products are a one to
one compound of silicon (Si) and carbon (C),
ultrapure and highly resistant to wear, heat,
and corrosion. They are used widely in the
manufacturing of semiconductors as wafer
boats and tubes and silicon wafer replacement
dummy wafers, as jigs used at high

Industries that use these technologies
Audio Automotive Electronics Medical Equipment Home Appliance Other Industries
The Equipment Related Business
Vacuum Seals  
Quartz Products  
SiC Parts (CVD-SiC)  
Silicon Parts  
EB Components    
Vacuum Coating System    
Silicon Wafers    
Process Tools Parts Cleaning            
Electronic Device Business
Thermo-electric Modules  
Power Electronic Substrates  
Manufacturing Bases