Region

Ferrotec Global

The Equipment Related BusinessEssential Devices in the Manufacturing Process

Quartz Products

Ultra-High Purity Glass,
Tough against Heat
and Chemical Changes

The semiconductor manufacturing process involves frequent treatments of high heat and chemicals. Coming into play here are quartz products composed of ultra-high-purity silica glass. Whether it is in the thin film generation and diffusion process, or as jigs and consumables in the transport and cleaning process of wafers, our quartz products play an important role in the processing of increasingly thinning and high purification semiconductors.

Industries that use these technologies
Audio Automotive Electronics Medical Equipment Home Appliance Other Industries
The Equipment Related Business
Vacuum Seals  
 
 
Quartz Products  
 
 
Ceramics  
   
SiC Parts (CVD-SiC)  
 
Silicon Parts  
 
 
EB Components    
   
Vacuum Coating System    
   
Silicon Wafers    
     
Electronic Device Business
Ferrofluid
 
Thermo-electric Modules  
 
Power Semiconductor Substrate  
 
Manufacturing Bases
Case Examples of Quartz Product
  • CVD Equipment

    CVD, or chemical vapor deposition, is one technique for making thin films. Gas containing components needed for different membranes are exposed to heated substrates, resulting in the deposition of a membrane by chemical reaction on the substrate surface.

  • Etching Equipment

    Etching is a surface processing method that uses the corrosive effect of a chemical solution or reactive gas. In semiconductor manufacturing it is used as a method to remove thin films in the patterning process of wafers. There is dry etching, which uses gas turned into plasma to accelerate ions to scrape away film by scientific reaction, and wet etching, which utilizes the corrosive effects of acid and alkali.


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