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-
- Vacuum Seals
- Quartz Products
- Ceramics
- SiC Parts (CVD-SiC)
- Silicon Parts
- EB Components
- Vacuum Coating System
- Silicon Wafers
- Reclaim Wafer
- Process Tools Parts Cleaning
- Single Crystal Silicon Ingot Puller
- Quartz Crucibles
- Ferrofluid
- Thermo-electric Modules
- Chillers
- Thermistors
- Power Electronic Substrates
- Photovoltaic Silicon
- Saw Blades
- Industrial Knives and Cutters
- CMS
- Industrial Laundry Machine
- The Equipment Related Business
- Electronic Device Business
- Photovoltaic Related Products
- Other Related Business
The Equipment Related Business
Semiconductor Single Crystal Silicon
Ingot Puller
FT-CZ1200Se/1400Se
This is the apparatus for producing single-crystal ingots that takes advantage of our core technology cultivated in the semiconductor process. The silicon melt of dissolved raw polysilicon is pulled up in a vacuum furnace to shape the ingot. Maintaining the vacuum environment in the apparatus is our company’s vacuum seal technology.The carbon heaters that melt the raw materials at high temperatures, as well as the receptacle crucibles are also our own products. We underpin the world's top class high conversion efficiency for single-crystal modules.
Size
Specification
| Semiconductor grade FT-CZ1200Se |
Semiconductor grade FT-CZ1400Se |
Remark (Apply to both models) |
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| Location | Enviromental tempreture | 15~30 ℃ | 15~30 ℃ | |
| Enviromental humidity | 65% (No condention , no corrosion gas ) |
65% (No condention , no corrosion gas ) |
||
| Merit rating | 10000 Class(ISO6) | 10000 Class(ISO6) | ||
| Noise | 75db | 75db | ||
| Fundamental | Above 3000kg/ m2 | Above 3000kg/ m2 | ||
| Power supply | Rated voltage | 3P 380VAC±10% 50/60Hz |
3P 380VAC±10% 50/60Hz |
|
| Rated capacity | 320kVA | 420kVA (Main power + Auxiliary power) |
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| Rated currency | 500A | 650A (Main power + Auxiliary power) |
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| Cooling water | Flow range | 350 ～ 400L/min | 500L/min | |
| Supply pressure | 0.3 ～ 0.4MPa | 0.3 ～ 0.4MPa | ||
| Parameter | Height | <8991mm | <9700mm | ΔAccording to the height of the upper chamber |
| Weight | Approximate 25T | Approximate 26T | ※Not including magnet | |
| Chamber material | 304L/316L | 304L/316L | ||
| Chamber inner diameter | 1200mm | 1400mm | ||
| Minimum inner diameter of the chamber | 340mm | 400mm | Δ | |
| Maximum vacuum degree | <1Pa | <1Pa | ||
| Leakage | 5Pa/hr | 5Pa/hr | ||
| Seed wire stroke | Approximate 4500mm | Approximate 5800mm | ||
| Seed low lifting speed | 0.08 ～ 7.9 mm/min | 0.08 ～ 7.9 mm/min | ||
| Seed rotating speed | 0.1 ～ 25rpm | 0.1 ～ 25rpm | ※Not including the seed vibration point | |
| Seed weight | MAX 240Kg | MAX 600Kg | Δ | |
| Crucible stroke | 700mm | 680mm | ||
| Crucible lifting speed-low | 0.03 ～ 3.0 mm/min | 0.016 ～ 1.6 mm/min | ||
| Crucible rotating speed | 0.1 ～ 20rpm | 0.1 ～ 20rpm | ||
| Crucible bearing weight | MAX 600Kg | MAX 1000Kg | Δ The bearing weight can be increased according to the customer requirement | |
| Heater lifting stroke | 250mm | 250mm | ||
| Heater lifting speed | MAX 200mm/min | MAX 200mm/min | ||
| Magnet lifting stroke | 1250mm | 1500mm | ||
| Magnet lifting speed | MAX 400mm/min | MAX 400mm/min | ||
| Magnet structure bearing weight | 1000Kg | 10000Kg | Δ |
※ The parameter above is only for the standard model , The parameter remark "Δ" can be adjusted according to the customer requirement.
FerroTec Shanghai
Shanghai Shanghai Hanhong Precision Machinery Co., Ltd.
Manufacturing Bases
